Multi-process Compressed Air Supply for Semiconductor Manufacturing
As a leading enterprise in the field of semiconductor materials and equipment, the company has strict process requirements for the cleanliness and pressure stability of compressed air in ultra-precision processes such as single crystal silicon growth and wafer cutting. The quality of the compressed-air supply directly affects the purity of semiconductor materials and the performance of devices.
As a leading enterprise in the field of semiconductor materials and equipment, the company has strict process requirements for the cleanliness and pressure stability of compressed air in ultra-precision processes such as single crystal silicon growth and wafer cutting. The quality of the compressed-air supply directly affects the purity of semiconductor materials and the performance of devices.
Project Implementation and Operating Results
As a leading enterprise in the field of semiconductor materials and equipment, the company has strict process requirements for the cleanliness and pressure stability of compressed air in ultra-precision processes such as single crystal silicon growth and wafer cutting. The quality of the compressed-air supply directly affects the purity of semiconductor materials and the performance of devices.
The project uses two BOSAN screw air compressors: one LD PMII and one BDS-50. Together, they supply compressed air for pneumatic controls and auxiliary equipment. Air treatment supports the cleanliness requirements of the pneumatic system; this supply is distinct from the dedicated process gases used in semiconductor manufacturing.
After the equipment was put into operation, the enterprise's monocrystalline silicon yield effectively improved, the energy consumption of the compressed-air supply system was reduced, providing solid support for the mass production of high-end semiconductor materials.
The figures apply to this project and its specific operating conditions, not guaranteed results for other projects or the entire product series. Configuration and performance are subject to the project technical agreement.